RONALD H BOULEY
Broker in Windham, NH
License number
Massachusetts 137662
Issued Date
Jul 23, 1990
Expiration Date
Oct 17, 2004
Type
Broker
Address
Address
Windham, NH 03087
Professional information
Attitude Error Self-Correction For Thermal Sensors Of Mass Flow Meters And Controllers
US Patent:
7000465, Feb 21, 2006
Filed:
Sep 17, 2004
Appl. No.:
10/943377
Inventors:
Michael L'Bassi - Sterling MA, US
Mark J. Quaratiello - Atkinson NH, US
Ronald H. Bouley - Windham NH, US
Mark J. Quaratiello - Atkinson NH, US
Ronald H. Bouley - Windham NH, US
Assignee:
MKS Instruments, Inc. - Wilmington MA
International Classification:
G01F 1/68
US Classification:
7320427
Abstract:
A system for and method of compensating for attitude sensitivity of at least two thermal sensor coils mounted on a tube through which a fluid flows along a common axis of flow for use in generating a flow measurement signal representative of the flow of fluid through the tube is disclosed. One of the coils is adapted in provide thermal energy to the fluid flowing through the tube at an upstream location so as to establish and measure the upstream temperature of the fluid at the upstream location, and one of the coils is adapted to measure the downstream temperature of the fluid at a downstream location. The flow measurement signal is a function of the difference between the measured upstream and downstream temperatures. The system includes structure for, and the method includes the steps of measuring the force of gravity in the direction of the common axis; and modifying the flow measurement signal as a function of the measured force of gravity.