Inventors:
Si Hyung Cho - Macungie PA
Ronald E. Leibenguth - Palmerton PA
Abdallah Ougazzaden - Emmaus PA
Claude L. Reynolds - Sinking Springs PA
Assignee:
Agere Systems Inc. - Allentown PA
International Classification:
H01L 2100
US Classification:
438 21, 438 27, 438 28, 385 14
Abstract:
The present invention provides a method for monolithic integration of multiple devices on an optoelectronic substrate. The method, in a preferred embodiment, includes forming an active layer having a given wavelength over a substrate. The method further includes forming an N-type doped layer over a portion of the active layer to form first and second active regions within the active layer, the first active region having the given wavelength and the second active region having an altered wavelength different from the given wavelength. In one exemplary embodiment, the conditions used to form the N-type doped layer, for example, dopant concentration, growth rate and temperature, cause the difference in wavelength between the given wavelength and the altered wavelength.