ROBERT S ZELLER
Plumbers in Boston, MA
License number
Massachusetts 25638
Issued Date
Apr 18, 2000
Expiration Date
May 1, 2018
Type
Journeyman Plumber
Address
Address
Boston, MA 02118
Professional information
Human Being
Position:
Consulting Research Engineer at Entegris
Location:
Greater Boston Area
Industry:
Research
Work:
Entegris
since 2004
-
Consulting Research Engineer
Lithographic Projection Apparatus, Gas Purging Method, Device Manufacturing Method And Purge Gas Supply System Related Application
US Patent:
2006028, Dec 21, 2006
Filed:
Apr 3, 2006
Appl. No.:
11/396823
Inventors:
Bipin Parekh - Chelmsford MA, US
Robert Zeller - Boston MA, US
Russell Holmes - Santee CA, US
Jeffrey Spiegelman - San Diego CA, US
Robert Zeller - Boston MA, US
Russell Holmes - Santee CA, US
Jeffrey Spiegelman - San Diego CA, US
International Classification:
G03B 27/52
US Classification:
355030000, 355053000
Abstract:
A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configured to pattern a projection beam according to a desired pattern. The apparatus has a substrate table configured to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge pas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.
Lithographic Projection Apparatus, Purge Gas Supply System And Gas Purging Method
US Patent:
7789940, Sep 7, 2010
Filed:
Jul 21, 2004
Appl. No.:
10/565486
Inventors:
Bipin S. Parekh - Chelmsford MA, US
Jeffrey J. Spiegelman - San Diego CA, US
Robert S. Zeller - Boston MA, US
Russell J. Holmes - Santee CA, US
Jeffrey J. Spiegelman - San Diego CA, US
Robert S. Zeller - Boston MA, US
Russell J. Holmes - Santee CA, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
B01D 53/22, G03B 21/14
US Classification:
95 52, 96 8, 96 10, 96 11, 96 12, 261101, 355 30, 355 53
Abstract:
A lithographic projection apparatus () includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system () configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system () includes a purge gas mixture generator () configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer () configured to add the moisture to the purge gas and a purge gas mixture outlet () connected to the purge gas mixture generator () configured to supply the purge gas mixture near the surface.
Method For Forming Titanium Anisotropic Metal Particles
US Patent:
6197085, Mar 6, 2001
Filed:
Oct 8, 1998
Appl. No.:
9/168776
Inventors:
Robert S. Zeller - Boston MA
Christopher J. Vroman - Natick MA
Christopher J. Vroman - Natick MA
Assignee:
Millipore Corporation - Bedford MA
International Classification:
C22C 1400
US Classification:
75245
Abstract:
A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
High-Efficiency Metal Membrane Element, Filter, And Process For Making
US Patent:
RE36249, Jul 13, 1999
Filed:
Jan 30, 1998
Appl. No.:
9/016706
Inventors:
Robert S. Zeller - Boston MA
Assignee:
Millipore Investment Holdings, Inc. - Wilmington DE
International Classification:
B01D 4610, C22C 104
US Classification:
55523
Abstract:
A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form. The present filter devices exhibit superior porosity and face velocities, negligible outgassing and limited particle shedding when compared to the devices of the prior art.
Porous Sintered Composite Materials
US Patent:
7329311, Feb 12, 2008
Filed:
Aug 10, 2006
Appl. No.:
11/502215
Inventors:
Robert Zeller - Boston MA, US
Christopher Vroman - Shrewsbury MA, US
Christopher Vroman - Shrewsbury MA, US
Assignee:
Entegris, In. - Chaska MN
International Classification:
B01D 39/20, B01D 46/10, B01D 50/00
US Classification:
95273, 95274, 55318, 55486, 55487, 55495, 55498, 55512, 55516, 55523, 428546, 428547, 428550, 428615, 428680, 428402, 428689, 210490, 21050021, 21050025, 2105101, 264603, 264628, 264DIG 48
Abstract:
The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.
Porous Sintered Composite Materials
US Patent:
7112237, Sep 26, 2006
Filed:
Dec 11, 2003
Appl. No.:
10/733218
Inventors:
Robert Zeller - Boston MA, US
Christopher Vroman - Shrewsbury MA, US
Christopher Vroman - Shrewsbury MA, US
Assignee:
Entegris, Inc. - Chaska MN
International Classification:
B01D 39/20, B01D 46/10, B01D 50/00
US Classification:
95273, 95274, 55318, 55486, 55487, 55495, 55498, 55512, 55516, 55523, 428546, 428547, 428550, 428615, 428680, 428402, 428689, 210490, 21050021, 21050025, 2105101
Abstract:
The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.
Porous Sintered Composite Materials
US Patent:
7534287, May 19, 2009
Filed:
Dec 10, 2007
Appl. No.:
12/001112
Inventors:
Robert Zeller - Boston MA, US
Christopher Vroman - Shrewsbury MA, US
Christopher Vroman - Shrewsbury MA, US
Assignee:
Entegris, Inc. - Chaska MN
International Classification:
B01D 39/20, B01D 46/00, B01D 50/00
US Classification:
95273, 95274, 55318, 55486, 55487, 55495, 55498, 55512, 55516, 55523, 428546, 428547, 428550, 428615, 428680, 428402, 428689, 210490, 21050021, 21050025, 2105101
Abstract:
The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.
Sintered Porous Material Comprising Particles Of Different Average Sizes
US Patent:
2012007, Apr 5, 2012
Filed:
Jun 16, 2010
Appl. No.:
13/375844
Inventors:
Robert S. Zeller - Boston MA, US
International Classification:
B01D 39/20, B01D 46/00
US Classification:
95273, 55523, 55495
Abstract:
A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.
Porous Metal Body Of Sintered Metal Powders And Metal Fibers
US Patent:
2013030, Nov 21, 2013
Filed:
Jan 24, 2012
Appl. No.:
13/982936
Inventors:
Robert S. Zeller - Boston MA, US
Assignee:
ENTEGRIS, INC. - Billerica MA
International Classification:
B01D 39/20, B22F 7/00
US Classification:
55523, 428566, 419 2
Abstract:
A sintered porous body made from a green compact of a flowable air laid mixture of metal particles and metal fibers is disclosed. The green compact is sintered to provide the porous sintered body with an isotropic distribution of metal particles and metal fibers throughout the matrix. The porous sintered body includes metal particles which act as nodes and are sintered to fibers and portions of fibers are sintered to other fibers.