ROBERT L PRICE
Engineering in Oakdale, MA
License number
Massachusetts 20866
Issued Date
Sep 23, 1966
Expiration Date
Jun 30, 2004
Type
Mechanical Engineer
Address
Address
Oakdale, MA 01583
Professional information
Semiconductor Wafer Cassette Positioning And Detection Mechanism
US Patent:
5970621, Oct 26, 1999
Filed:
Jan 7, 1999
Appl. No.:
9/227177
Inventors:
Kenneth J. Bazydola - Waltham MA
Robert L. Price - West Boylston MA
Robert L. Price - West Boylston MA
Assignee:
PRI Automation, Inc. - Billerica MA
International Classification:
B65G 4907
US Classification:
33613
Abstract:
An apparatus for detecting the presence of a wafer cassette, or pod, resting on an arrangement of pins allows cassette detection without interfering with insertion of a robotic paddle arm beneath the cassette to remove it for transport. A cassette resides on an arrangement of beveled pins which mate with corresponding receptacles on the underside. Pins supporting the cassette have a spring biased, hollow outer cylinder coaxially mounted around a center post. A cassette placed on the pins displaces the outer cylinder downward a sufficient distance to trigger a sensor. Upon removal of the cassette, the outer cylinder is displaced upwards, resetting the sensor.