Inventors:
Joseph G. Guilmette - Hingham MA
Robert C. Wright - Hingham MA
International Classification:
H01L 21306, B44C 122, C03C 1500, C23F 102
Abstract:
A cold trap system is disclosed for recovering and recycling condensable gas reactants, such as xenon difluoride. Continuous recovery and recycling is achieved through a system including a plurality of cold traps and a storage chamber having a single input/output access pipe.