ROBERT J KRMPOTICH
Broker in Salem, NH
License number
Massachusetts 9046387
Issued Date
Jun 15, 2002
Expiration Date
Jun 4, 2005
Type
Salesperson
Address
Address
Salem, NH 03079
Professional information
Butterfly Valve And System Employing Same And Method For Using Same Field
US Patent:
2011010, May 5, 2011
Filed:
Nov 3, 2009
Appl. No.:
12/611760
Inventors:
Jaroslaw W. Pisera - Bedford MA, US
David B. Chamberlain - Hooksett NH, US
Robert Krmpotich - Salem NH, US
Paul D. Lucas - Melrose MA, US
David B. Chamberlain - Hooksett NH, US
Robert Krmpotich - Salem NH, US
Paul D. Lucas - Melrose MA, US
International Classification:
F16K 1/22, B08B 3/00
US Classification:
251305, 251304, 137 1504
Abstract:
A butterfly valve comprises: a body including a valve opening; and a flapper rotatably mounted about a rotation axis so as to be movable relative to the valve opening. The flapper is rotatable at least 180° about the rotation axis so that the flapper is movable to at least one fully opened position, at least one fully closed position 90° apart from the fully opened position, and a third position, either fully opened or fully closed, 180° from the other like position. In one embodiment the flapper is rotatable at least 360° about the rotation axis so that the flapper is movable to each of two opened positions 180° apart, and two closed positions 180° apart from each other and 90° and 270° apart from each of the fully opened positions. The valve can be easily calibrated and controlled, and cleaned to extend the useful service life between cleanings.
Systems For And Methods Of Controlling Time-Multiplexed Deep Reactive-Ion Etching Processes
US Patent:
2013002, Jan 31, 2013
Filed:
Jul 28, 2011
Appl. No.:
13/193393
Inventors:
Vladislav Davidkovich - Stoneham MA, US
Martin Ryan - Reading MA, US
David Chamberlain - Hooksett NH, US
Philip W. Sullivan - Lexington MA, US
Paul D. Lucas - Melrose MA, US
John Thomas Hillhouse - Newburyport MA, US
Robert Krmpotich - Salem NH, US
Martin Ryan - Reading MA, US
David Chamberlain - Hooksett NH, US
Philip W. Sullivan - Lexington MA, US
Paul D. Lucas - Melrose MA, US
John Thomas Hillhouse - Newburyport MA, US
Robert Krmpotich - Salem NH, US
International Classification:
H01L 21/00, F15D 1/00, C23F 1/08
US Classification:
15634526, 137596, 137 1
Abstract:
An improved gas delivery system and method delivers a sequence of pulses of prescribed amounts of at least two gases to a process chamber of a process tool in accordance with a predetermined recipe of steps of a gas delivery process. The system comprises: a plurality of channels, each including a control valve connected so as to control each pulse of gas flowing through the corresponding channel into the process chamber of the process tool; and an exhaust valve for controlling the pressure within the process chamber, the exhaust valve including a valve controller for controlling the operation of the gas delivery system including the control valves and the exhaust valve in accordance with the predetermined recipe of steps. In one embodiment, the exhaust valve controller is configured to operate in a hybrid feedback mode including both open feedback loop control wherein the exhaust valve is set at a preselected position based on a past learned position for each step of the gas delivery process, and closed feedback loop control of the system for each step of the gas delivery process as a function of the pressure within the process chamber following the open loop control.