Inventors:
James F. Detry - Plymouth MN, US
Robert J. Carlson - Brooklyn Park MN, US
Pamela Marie Norris - Charlottesville VA, US
Arthur Weston Lichtenberger - Charlottesville VA, US
Roy Matthews - Cedar Park TX, US
Casey Marie Nabors Bauer - Charlottesville VA, US
Matthew Linton Bauer - Charlottesville VA, US
Assignee:
HONEYWELL INTERNATIONAL INC. - Morristown NJ
International Classification:
B32B 3/26, F16F 15/00, H05K 7/00
US Classification:
428158, 4283044, 4283191, 4283166, 36167901, 181207
Abstract:
An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer.