ROBERT ERNIE GRUBBS
Pilots at Silent Spg Dr, Albuquerque, NM
License number
New Mexico A0735006
Issued Date
Jan 2016
Expiration Date
Jul 2016
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
203 Silent Spring Dr NE, Albuquerque, NM 87124
Personal information
See more information about ROBERT ERNIE GRUBBS at radaris.comName
Address
Phone
7429 Gettysburg Rd NE, Albuquerque, NM 87109
Professional information
Nanostructure Templating Using Low Temperature Atomic Layer Deposition
US Patent:
8080280, Dec 20, 2011
Filed:
Oct 16, 2007
Appl. No.:
11/872749
Inventors:
Robert K. Grubbs - Albuquerque NM, US
Gregory R. Bogart - Corrales NM, US
John A. Rogers - Champaign IL, US
Gregory R. Bogart - Corrales NM, US
John A. Rogers - Champaign IL, US
Assignee:
Sandia Corporation - Albuquerque NM
International Classification:
C23C 16/00
US Classification:
4272481, 4272557
Abstract:
Methods are described for making nanostructures that are mechanically, chemically and thermally stable at desired elevated temperatures, from nanostructure templates having a stability temperature that is less than the desired elevated temperature. The methods comprise depositing by atomic layer deposition (ALD) structural layers that are stable at the desired elevated temperatures, onto a template employing a graded temperature deposition scheme. At least one structural layer is deposited at an initial temperature that is less than or equal to the stability temperature of the template, and subsequent depositions made at incrementally increased deposition temperatures until the desired elevated temperature stability is achieved. Nanostructure templates include three dimensional (3D) polymeric templates having features on the order of 100 nm fabricated by proximity field nanopatterning (PnP) methods.