ROBERT EARL WEEKS
Pilots at Katydid Cir, San Diego, CA
License number
California A4416287
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
12295 Katydid Cir, San Diego, CA 92129
Professional information
Owner: Gratitude And Love Bottles
Position:
Owner at Gratitude and Love Bottles, Owner at Robert Weeks Photography, Scuba Instructor at University of California at San Diego
Location:
Greater San Diego Area
Industry:
Consumer Goods
Work:
Gratitude and Love Bottles
since Jul 2009
-
Owner
Robert Weeks Photography
since Sep 2007
-
Owner
University of California at San Diego
since 1989
-
Scuba Instructor
Cymer
Nov 1994 - Apr 2007
-
Director, Optics Manufacturing
Education:
University of California, San Diego 1982 - 1987
B.S., Physics
B.S., Physics
Laser Discharge Chamber Passivation By Plasma
US Patent:
6644324, Nov 11, 2003
Filed:
Mar 6, 2000
Appl. No.:
09/518970
Inventors:
Tom A. Watson - Carlsbad CA
Richard L. Sandstrom - Encinitas CA
Richard G. Morton - San Diego CA
Robert E. Weeks - San Diego CA
John P. Quitter - San Diego CA
Mark R. Lewis - Oceanside CA
Richard L. Sandstrom - Encinitas CA
Richard G. Morton - San Diego CA
Robert E. Weeks - San Diego CA
John P. Quitter - San Diego CA
Mark R. Lewis - Oceanside CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
B08B 704
US Classification:
134 11, 134 2218, 134 30
Abstract:
Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.
Laser Discharge Chamber Passivation By Plasma
US Patent:
6914927, Jul 5, 2005
Filed:
Aug 26, 2003
Appl. No.:
10/649186
Inventors:
Tom A. Watson - Carlsbad CA, US
Richard L. Sandstrom - Encinitas CA, US
Richard G. Morton - San Diego CA, US
Robert E. Weeks - San Diego CA, US
John P. Quitter - Escondido CA, US
Mark R. Lewis - Oceanside CA, US
Richard L. Sandstrom - Encinitas CA, US
Richard G. Morton - San Diego CA, US
Robert E. Weeks - San Diego CA, US
John P. Quitter - Escondido CA, US
Mark R. Lewis - Oceanside CA, US
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S003/22, H01S003/03, H01S003/091, H01S003/09
US Classification:
372 58, 372 55, 372 57, 372 59, 372 61, 372 76, 372 82, 372 90
Abstract:
Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.