Inventors:
Gary L. Harkleroad - Indiana PA, US
Robert Vaccaro - Greensburg PA, US
Assignee:
Sony Corporation - Tokyo
Sony Electronics Inc. - Park Ridge NJ
International Classification:
B05D 5/12, B44C 1/22
Abstract:
Dimensional stabilization of a precision etched mask used in the production of organic light emitting diode display panels. This may entail securing a sheet of mask material, and then heating the sheet of mask material to a temperature within a predetermined range for a predetermined amount of time to produce a treated sheet of mask material. The treated sheet of mask material may then be used to fabricate a dimensionally stable precision etched mask, such as by exposing and etching the treated sheet of mask material.