ROBERT ANTHONY JACOBS
Pilots at Ruth Ct, Grass Valley, CA
License number
California A3185956
Issued Date
Jan 2016
Expiration Date
Jan 2018
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
17259 Ruth Ct, Grass Valley, CA 95949
Professional information
Temperature Control System For A Device Under Test
US Patent:
2010003, Feb 18, 2010
Filed:
Aug 11, 2009
Appl. No.:
12/539545
Inventors:
Robert JACOBS - Grass Valley CA, US
Assignee:
DCG SYSTEMS, INC. - Fremont CA
International Classification:
G01R 31/02, F28F 7/00, F28F 27/00
US Classification:
324537, 165 803, 165 804, 165246, 165247
Abstract:
A temperature control system for an optical microscope for inspecting an integrated circuit device under test (DUT) that includes a first fluid circulation system coupled to and supplying fluid to fluid injectors that spray fluid on the DUT and a second fluid circulation system for exchanging energy between fluids in the first fluid circulation system and the second fluid circulation system (e.g., via a heat exchanger). The fluid injectors may be configured to mix the fluid and pressurized air that can be sprayed on the DUT to cool and/or heat the DUT.