Inventors:
Robert JACOBS - Grass Valley CA, US
Assignee:
DCG SYSTEMS, INC. - Fremont CA
International Classification:
G01R 31/02, F28F 7/00, F28F 27/00
US Classification:
324537, 165 803, 165 804, 165246, 165247
Abstract:
A temperature control system for an optical microscope for inspecting an integrated circuit device under test (DUT) that includes a first fluid circulation system coupled to and supplying fluid to fluid injectors that spray fluid on the DUT and a second fluid circulation system for exchanging energy between fluids in the first fluid circulation system and the second fluid circulation system (e.g., via a heat exchanger). The fluid injectors may be configured to mix the fluid and pressurized air that can be sprayed on the DUT to cool and/or heat the DUT.