ROBERT ANDERSON
Architects at Augusta Pl, Tucson, AZ
License number
Alaska AELC3896
Issued Date
Aug 26, 1975
Effective Date
Jan 25, 2010
Category
Architects, Engineers and Land Surveyors
Address
Address
2002 S Augusta Pl, Tucson, AZ 85710
Professional information
None At !Noob Oy
Position:
none at !noob Oy
Location:
Tucson, Arizona Area
Industry:
Financial Services
Work:
!noob Oy
-
none
Independent Electrical/Electronic Manufacturing Professional
Location:
Tucson, Arizona Area
Industry:
Electrical/Electronic Manufacturing
Die Singulation Method And Package Formed Thereby
US Patent:
8236611, Aug 7, 2012
Filed:
Apr 13, 2010
Appl. No.:
12/758833
Inventors:
Robert C. Anderson - Tucson AZ, US
Randy J. Shul - Albuquerque NM, US
Peggy J. Clews - Tijeras NM, US
Michael S. Baker - Albuquerque NM, US
Maarten P. De Boer - Albuquerque NM, US
Randy J. Shul - Albuquerque NM, US
Peggy J. Clews - Tijeras NM, US
Michael S. Baker - Albuquerque NM, US
Maarten P. De Boer - Albuquerque NM, US
Assignee:
Sandia Corporation - Albuquerque NM
International Classification:
H01L 21/00
US Classification:
438113, 438460, 257E21483
Abstract:
A method is disclosed for singulating die from a substrate having a sacrificial layer and one or more device layers, with a retainer being formed in the device layer(s) and anchored to the substrate. Deep Reactive Ion Etching (DRIE) etching of a trench through the substrate from the bottom side defines a shape for each die. A handle wafer is then attached to the bottom side of the substrate, and the sacrificial layer is etched to singulate the die and to form a frame from the retainer and the substrate. The frame and handle wafer, which retain the singulated die in place, can be attached together with a clamp or a clip and to form a package for the singulated die. One or more stops can be formed from the device layer(s) to limit a sliding motion of the singulated die.
Museum Tech At Fort Huachuca Museum
Position:
Museum Tech at Fort Huachuca Museum
Location:
Tucson, Arizona Area
Industry:
Museums and Institutions
Work:
Fort Huachuca Museum
-
Museum Tech