ROBERT A BENNER
Funeral Home and Crematory in Perkasie, PA
License number
Pennsylvania FD004021L
Category
Funeral Directors
Type
Funeral Director
Address
Address
Perkasie, PA 18944
Professional information
Polishing Pad Conditioning System
US Patent:
6508697, Jan 21, 2003
Filed:
Jul 16, 2001
Appl. No.:
09/906446
Inventors:
Robert Lyle Benner - Perkasie PA 18944
Stephen J. Benner - Lansdale PA 19446
Robert L. Benner - Chalfont PA 18914
Stephen J. Benner - Lansdale PA 19446
Robert L. Benner - Chalfont PA 18914
International Classification:
B24B 1900
US Classification:
451443, 451444, 451 56, 451456, 451285
Abstract:
A system for conditioning rotatable polishing pads used to planarize and polish surfaces of thin film integrated circuits deposited on semiconductor wafer substrates, microelectronic, and optical system. The system has a pad conditioning apparatus, process fluids, a vacuum capability to pull waste material out of the conditioning pad, self-contained flushing means, and a piezo-electric device for vibrating the pad conditioning apparatus.