Inventors:
Richard Nguyen - San Diego CA
Assignee:
The United States of America as represented by the Secretary of the Navy - Washington DC
International Classification:
H01L 2104
Abstract:
A high transconductance, low capacitance, low leakage compound semiconduc junction field effect transistor (JFET) enhances the low leakage current while having the advantages of a self-aligned JFET including low capacitance and low source-drain resistance. The diffused junction of the JFET is totally covered during the process of manufacture. An n channel on a substrate has a layer of photoresist placed over it and exposed to leave a predefined pattern of photoresist. The patterned photoresist is used as a mask so that part of the n-channel layer is etched down to a desired depth leaving a wedge-shaped region. A layer of insulator, such as silicon dioxide, is deposited over the entire substrate and sides of the w edge-shaped region in insulator regions. Next, the photoresist is then removed. A p. sup. + diffusion or implant is performed in the wedge-shaped region to create a p. sup.