Inventors:
Richard W. Hoffman - Bay Village OH
David M. Wilt - Bay Village OH
Assignee:
Essential Research, Inc. - Cleveland OH
International Classification:
H01L 2120
US Classification:
438 94, 438 93, 438503, 438930, 438936, 117954
Abstract:
A method for growing In Ga As epitaxial layer on a lattice mismatched InP substrate calls for depositing by organo-metallic vapor phase epitaxy, or other epitaxial layer growth technique, a plurality of discreet layers of InAs P over an InP substrate. These layers provide a buffer. Each succeeding buffer layer has a distinct composition which produces less than a critical amount of lattice mismatch relative to the preceding layer. An In Ga As epitaxial layer is grown over the buffer wherein 0. 53x0. 76. A resulting InGaAs structure comprises an InP substrate with at least one InAsP buffer layer sandwiched between the substrate and the InGaAs epitaxial layer. The buffer layer has a critical lattice mismatch of less than 1. 3% relative to the substrate. Additional buffer layers will likewise have a lattice mismatch of no more than 1.