RICHARD ARTHUR DENTON
Engineers in Marlton, NJ
License number
Pennsylvania PE010521L
Category
Engineers
Type
Professional Engineer
Address
Address
2
Marlton, NJ 08053
Pennsylvania
Pennsylvania
Personal information
See more information about RICHARD ARTHUR DENTON at radaris.comName
Address
Phone
4113 Hain Dr, Lafayette Hl, PA 19444
310 Marigold Dr, Greensburg, PA 15601
310 Marigold Dr, Greensburg, PA 15601
27 Cambridge Rd, Verona, NJ 07044
Professional information
Apparatus For Improving A Sputtering Process
US Patent:
4395323, Jul 26, 1983
Filed:
Apr 17, 1981
Appl. No.:
6/257314
Inventors:
Richard A. Denton - Marlton NJ
Bawa Singh - Cherry Hill NJ
Bawa Singh - Cherry Hill NJ
Assignee:
Denton Vacuum Inc. - Cherry Hill NJ
International Classification:
C23C 1500
US Classification:
204298
Abstract:
The present invention provides, in a sputtering apparatus, an anode means interposed between the cathode and the substrate (upon which material is to be deposited) which acts to intercept electrons so that they do not impinge on the substrate and which is formed to permit the material dislodged from the cathode (by impinging ions) to pass beyond the anode and be deposited on the substrate. While the present invention can be usefully employed without the aid of a magnetic field, in a preferred embodiment, the present invention is made part of a planar magnetron.
External Plasma Gun
US Patent:
4652795, Mar 24, 1987
Filed:
Mar 14, 1985
Appl. No.:
6/712019
Inventors:
Kon J. Lee - Stratford NJ
Anthony Musset - Haddon Heights NJ
Richard A. Denton - Marlton NJ
Anthony Musset - Haddon Heights NJ
Richard A. Denton - Marlton NJ
Assignee:
Denton Vacuum Inc. - Cherry Hill NJ
International Classification:
H01J 724, H05H 100
US Classification:
31511141
Abstract:
The present device comprises, in a preferred embodiment, a permanent magnet assembly which is formed to closely resemble a doughnut with the inside surface defining an aperture having first and second ends. Said inside surface is formed concave to substantially resemble the letter "C. " The permanent magnet provides magnetic flux from one end of the "C" shaped inside surface to the other end. Hence the magnetic flux lines, or the magnetic flux field, form an enclosure with the concave configuration of the inside surface. An anode is located within the enclosure and is shielded by the magnetic flux field, i. e. , the magnetic flux impedes the electrons from directly striking the anode. A cathode means is fitted over said first end of the aperture of the permanent magnetic assembly. A plasma exit plate, having a substantially large aperture therein, is fitted over said second end of the aperture of the permanent magnetic assembly.