Inventors:
Harry M. Siegel - Hurst TX
Fred P. Lane - Highland Village TX
Richard P. Evans - Double Oak TX
Assignee:
STMicroelectronics, Inc. - Carrollton TX
International Classification:
H01L 27100
US Classification:
257302, 257301, 257303, 438242, 438243, 438386
Abstract:
A touch-sensitive semiconductor chip having a physical interface to the environment, where the surface of the physical interface is coated with a fluorocarbon polymer. The polymer is highly scratch resistant and has a characteristic low dielectric constant for providing a low attenuation to electric fields. The polymer can be used instead of conventional passivation layers, thereby allowing a thin, low dielectric constant layer between the object touching the physical interface, and the capacitive sensing circuits underlying the polymer.