RAYMOND FRANCIS THOMPSON
Pilots in Kalispell, MT
License number
Montana A2145399
Issued Date
Jul 2015
Expiration Date
Jul 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
PO Box 2377, Kalispell, MT 59903
Professional information
Semiconductor Processing System With Wafer Container Docking And Loading Station
US Patent:
6833035, Dec 21, 2004
Filed:
May 22, 2000
Appl. No.:
09/575551
Inventors:
Raymond F. Thompson - Kalispell MT
Robert W. Berner - Kalispell MT
Gary L. Curtis - Kalispell MT
Stephen P. Culliton - Bozeman MT
Blaine G. Wright - Kalispell MT
Robert W. Berner - Kalispell MT
Gary L. Curtis - Kalispell MT
Stephen P. Culliton - Bozeman MT
Blaine G. Wright - Kalispell MT
Assignee:
Semitool, Inc. - Kalispell MT
International Classification:
B65G 4907
US Classification:
134 33, 134902, 414217, 41441608, 414805, 414938, 414940
Abstract:
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.