QUYNH T TRAN, DO
Osteopathic Medicine at 139 St, Vancouver, WA
License number
Washington OP60725221
Category
Osteopathic Medicine
Type
Internal Medicine
License number
Washington 167907
Category
Osteopathic Medicine
Type
Internal Medicine
Address
Address
2
2211 NE 139Th St, Vancouver, WA 98686
PO Box 2077, Portland, OR 97208
PO Box 2077, Portland, OR 97208
Phone
(503) 374-1864
(360) 487-4709 (Fax)
(503) 413-3900
(503) 413-3710 (Fax)
(360) 487-4709 (Fax)
(503) 413-3900
(503) 413-3710 (Fax)
Professional information
Controlled Edge Resistivity In A Silicon Wafer
US Patent:
2009021, Aug 27, 2009
Filed:
Dec 23, 2008
Appl. No.:
12/343344
Inventors:
Kevin Lite - Portland OR, US
Quynh Tran - Vancouver WA, US
Quynh Tran - Vancouver WA, US
Assignee:
Siltronic Corporation - Portland OR
International Classification:
B32B 7/02, H01L 21/20
US Classification:
428213, 438478, 257E2109
Abstract:
An epitaxial silicon wafer is provided with a thickness in the area adjacent the edge that is greater or less than the thickness adjacent the center. The wafer may be manufactured by a method wherein one or more process parameters are adjusted during deposition of epitaxial layer to control the edge thickness.