QING ZHANG
Pilots at De Rose Way, San Jose, CA
License number
California A5200583
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
1505 De Rose Way APT 113, San Jose, CA 95126
Professional information
Selection Of Polishing Parameters To Generate Removal Profile
US Patent:
2012027, Nov 1, 2012
Filed:
Apr 29, 2011
Appl. No.:
13/098257
Inventors:
Huanbo Zhang - San Jose CA, US
Garrett Ho Yee Sin - Sunnyvale CA, US
King Yi Heung - Santa Clara CA, US
Nathan Bohannon - Saratoga CA, US
Qing Zhang - San Jose CA, US
Garrett Ho Yee Sin - Sunnyvale CA, US
King Yi Heung - Santa Clara CA, US
Nathan Bohannon - Saratoga CA, US
Qing Zhang - San Jose CA, US
International Classification:
G06F 19/00
US Classification:
700103
Abstract:
Values are selected for a plurality of controllable parameters of a chemical mechanical polishing system that includes a carrier head with a plurality of zones to apply independently controllable pressures on a substrate. Data is stored relating variation in removal profile on a front surface of the substrate to variation in the controllable parameters, the data including removal at a plurality of positions on the front surface of the substrate, there being a greater number of positions than chambers. A value is determined for each parameter of the plurality of controllable parameters to minimize a difference between a target removal profile and an expected removal profile calculated from the data relating variation in removal profile on a front surface of the substrate to variation in the parameters. The value for each parameter of the plurality of controllable parameters is stored.