QIANG ZHAO
Massage Therapy at Rural Dr, Monterey Park, CA

7349079, Mar 25, 2008

May 14, 2004

10/845982

Qiang Zhao - San Jose CA, US
Torsten Kaack - Los Altos CA, US
Sungchul Yoo - Campbell CA, US
Zhengquan Tan - Cupertino CA, US

KLA-Tencor Technologies Corp. - Milpitas CA

G01N 21/41

356128

A method for measurement of a specimen is provided. The method includes measuring spectroscopic ellipsometric data of the specimen. The method also includes determining a nitrogen concentration of a nitrided oxide gate dielectric formed on the specimen from the spectroscopic ellipsometric data. A computer-implemented method for analysis of a specimen is also provided. This method includes determining a nitrogen concentration of a nitrided oxide gate dielectric formed on the specimen from spectroscopic ellipsometric data generated by measurement of the specimen. In some embodiments, the methods described above may include determining an index of refraction of the nitrided oxide gate dielectric from the spectroscopic ellipsometric data and determining the nitrogen concentration from the index of refraction. In another embodiment, the methods described above may include measuring reflectometric data of the specimen. The nitrogen concentration may be determined from the spectroscopic ellipsometric data in combination with the reflectometric data.

6165890, Dec 26, 2000

Jan 21, 1998

9/009952

Paul A. Kohl - Atlanta GA
Qiang Zhao - San Jose CA
Sue Ann Bidstrup Allen - Atlanta GA

Georgia Tech Research Corporation - Atlanta GA

H01L 214763

438619

A method of forming an air gap or gaps within solid structures and specifically semiconductor structures to reduce capacitive coupling between electrical elements such as metal lines, wherein a norbornene-type polymer is used as a sacrificial material to occupy a closed interior volume in a semiconductor structure. The sacrificial material is caused to decompose into one or more gaseous decomposition products which are removed, preferably by diffusion, through an overcoat layer. The decomposition of the sacrificial material leaves an air gap or gaps at the closed interior volume previously occupied by the norbornene-type polymer. The air gaps may be disposed between electrical leads to minimize capacitive coupling therebetween.

7504699, Mar 17, 2009

Nov 21, 2000

09/717567

Paul A. Kohl - Atlanta GA, US
Qiang Zhao - San Jose CA, US
Sue Ann Bidstrup Allen - Atlanta GA, US

George Tech Research Corporation - Atlanta GA

H01L 21/331, H01L 21/76, H01L 21/4763, H01L 21/44, H01L 21/469, H01L 21/461

257410, 257508, 257522, 257758, 257759, 257760, 438319, 438411, 438421, 438422, 438618, 438619, 438622, 438623, 438624, 438625, 438626, 438687, 438692, 438693

A method of forming an air gap or gaps within solid structures and specifically semiconductor structures to reduce capacitive coupling between electrical elements such as metal lines, wherein a norbornene-type polymer is used as a sacrificial material to occupy a closed interior volume in a semiconductor structure. The sacrificial material is caused to decompose into one or more gaseous decomposition products which are removed, preferably by diffusion, through an overcoat layer. The decomposition of the sacrificial material leaves an air gap or gaps at the closed interior volume previously occupied by the norbornene-type polymer. The air gaps may be disposed between electrical leads to minimize capacitive coupling therebetween.

2013023, Sep 12, 2013

Mar 9, 2012

13/416517

Christian Volf OLGAARD - Saratoga CA, US
Qiang ZHAO - San Jose CA, US

LITEPOINT CORPORATION - Sunnyvale CA

G01R 27/04

324633

A local oscillator (LO) of a test system is set to an initial frequency whereupon a device under test (DUT) transmits a radio frequency (RF) signal to the test system. Characteristics of the RF signal are measured with the test system and used to identify magnitudes and frequencies of spurious signal products. The LO of the test system is reset to one or more subsequent frequencies that are offset from the initial frequency. One or more subsequent RF signals are transmitted from the DUT to the test system, with the DUT maintaining its original signal settings. Characteristics of the subsequent RF signals are measured with the test system and used to identify magnitudes and frequencies of spurious signal products for each of the subsequent LO frequencies. The spurious signal products that have shifted in frequency for each of the subsequent LO frequencies as self-generated signal products can then be identified.

6291628, Sep 18, 2001

Jan 21, 1999

9/235141

Qiang Zhao - San Jose CA

Allied Signal Inc. - Morristown NJ

C08G 7902

528169

A polymeric low dielectric constant solution includes a low dielectric constant polymer dissolved in an aromatic aliphatic ether solvent. The polymer preferably is a poly(arylene ether) and the solvent preferably is anisole, methylanisole, phenetole or mixtures thereof. A process for forming a dielectric film on a substrate by spin-coating the polymeric solution is also provided.