Inventors:
Ji-Guang Zhang - Marietta GA, US
C. Tracy - Golden CO, US
David Benson - Golden CO, US
John Turner - Littleton CO, US
Ping Liu - Lakewood CO, US
International Classification:
H01M004/48, C01G031/02
Abstract:
Thin-film vanadium oxide layer that is suitable for use as a cathode in a lithium ion battery or other electronic applications, such as ion insertion layers in electrochromic devices as well as other uses, is deposited by a plasma-enhanced chemical vapor deposition at room temperature at rates as high as 11 /sec. from a vanadium-containing precursor reacted with oxygen and hydrogen. The vanadium oxide-based cathode produced by a lower temperature process and at a high deposition rate, exhibits a high discharge capacity, a high energy density, and a negligible capacity fade fiom its second cycle to at least 2,900 cycles, thus providing enhanced cyclic stability and an improved component for rechargeable lithium-ion batteries and other electronic devices.