Peng Zhang
Broker in Northborough, MA

License number
Massachusetts 9551347
Issued Date
Jun 16, 2016
Expiration Date
May 19, 2019
Type
Salesperson
Address
Address
Northborough, MA 01532

Professional information

Peng Zhang Photo 1

Ceramic Paddle

US Patent:
2009021, Aug 27, 2009
Filed:
Feb 20, 2009
Appl. No.:
12/389741
Inventors:
Scott A. Kaempfe - Brighton MA, US
Michael P. Kenney - Charlton MA, US
Karen A. Dwyer - Sterling MA, US
Peng Zhang - Northborough MA, US
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC. - Worcester MA
International Classification:
F27D 3/12, F27D 5/00
US Classification:
432 11, 432253, 432239
Abstract:
A paddle for the production of semiconductor wafers is provided. The paddle can be a cantilever paddle made of a ceramic such as silicon carbide and can be used with round or square wafers, such as photovoltaic wafers. The paddle exhibits excellent deflection and strength characteristics.