Inventors:
Scott A. Kaempfe - Brighton MA, US
Michael P. Kenney - Charlton MA, US
Karen A. Dwyer - Sterling MA, US
Peng Zhang - Northborough MA, US
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC. - Worcester MA
International Classification:
F27D 3/12, F27D 5/00
Abstract:
A paddle for the production of semiconductor wafers is provided. The paddle can be a cantilever paddle made of a ceramic such as silicon carbide and can be used with round or square wafers, such as photovoltaic wafers. The paddle exhibits excellent deflection and strength characteristics.