PAUL ERIK SATHRUM
Pilots at Blue Water Dr, Eureka Springs, AR
License number
Arkansas A2414451
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
73 Blue Water Dr, Eureka Springs, AR 72631
Professional information
President, Fluxion Inc.
Position:
President at Fluxion Inc.
Location:
Eureka Springs, Arkansas
Industry:
Research
Work:
Fluxion Inc.
since Jan 2001
-
President
Compact, Filtered Ion Source
US Patent:
2013020, Aug 15, 2013
Filed:
Feb 11, 2013
Appl. No.:
13/763994
Inventors:
Paul Erik Sathrum - Eureka Springs AR, US
Assignee:
FLUXION INC. - Eureka Springs AR
International Classification:
C23C 14/32
US Classification:
20419238, 20429841
Abstract:
The present invention relates to a filtered cathodic-arc ion source that reduces, or even eliminates, macroparticles while minimally compromising the compact size, simplicity, and high flux ion production benefits of unfiltered cathodic-arc sources. Magnetic and electrostatic forces are implemented in a compact way to guide ions along curved trajectories between the cathode source and the workpiece area such that macroparticles, which are minimally affected by these forces and travel in straight lines, are inhibited from reaching the workpieces. The present invention implements this filtering technique in a device that is compact, symmetrical and easy to manufacture and operate and which does not substantially compromise coating deposition rate, area, or uniformity.