Inventors:
James W. Seeser - Santa Rosa CA
Thomas H. Allen - Santa Rosa CA
Eric R. Dickey - Northfield MN
Bryant P. Hichwa - Santa Rosa CA
Rolf F. Illsley - Santa Rosa CA
Robert F. Klinger - Rohnert Park CA
Paul M. LeFebvre - Santa Rosa CA
Michael A. Scobey - Santa Rosa CA
Richard I. Seddon - Santa Rosa CA
David L. Soberanis - Santa Rosa CA
Michael D. Temple - Santa Rosa CA
Craig C. Van Horn - Sebastopol CA
Patrick R. Wentworth - Santa Rosa CA
Assignee:
Optical Coating Laboratory, Inc. - Santa Rosa CA
International Classification:
C23C 1434
Abstract:
A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.