PATRICIA C RICHARD
Barber in Billerica, MA
License number
Massachusetts 19227
Expiration Date
Dec 31, 2017
Type
Master Barber License
Address
Address
Billerica, MA 01821
Professional information
Microstructure And Method Of Making Such Structure
US Patent:
5399897, Mar 21, 1995
Filed:
Nov 29, 1993
Appl. No.:
8/158679
Inventors:
Brian T. Cunningham - Watertown MA
Patricia V. Richard - North Billerica MA
Patricia V. Richard - North Billerica MA
Assignee:
Raytheon Company - Lexington MA
International Classification:
H01L 2714, H01L 3100
US Classification:
257467
Abstract:
An integrated circuit having a semiconductor layer having formed therein a electronic circuit. An electrical device, electrically connected to the electronic circuit, has a corrugated platform supported over, displaced from, and integrally formed with, the substrate. In a preferred embodiment the electrical device is a bolometer and the electronic circuit is a read out circuit for the device. The platform includes a surface member and a leg, a proximate end of the leg being disposed on the substrate and the distal end being elevated from the substrate and terminating at the surface member. Preferably the leg and the surface member are corrugated. The supporting surface has a corrugation parallel with the leg. The surface member is supported, as a corrugated air-bridge, over the surface of the substrate by corrugated legs. The temperature sensitive resistive material is formed over the corrugated surface member.