Inventors:
Michael Antonell - Orlando FL
Erik Cho Houge - Orlando FL
Nitin Patel - Orlando FL
Larry E. Plew - St. Cloud FL
Catherine Vartuli - Windermere FL
Assignee:
Agere Systems Inc. - Allentown PA
International Classification:
H01L 2100
US Classification:
438800, 257684, 257701, 257706, 257717, 257719, 257730, 257735, 257777
Abstract:
A manufacturing method using a modular substrate-based processing scheme for producing semiconductor devices, provides multiple modular processing units which may be arranged together to form any of various cohesive processing units or individually or sequentially processed through standard semiconductor processing equipment. The cohesive processing units are processed unitarily providing for multiple modular processing units to be processed simultaneously. The modular processing units may be formed of a thick semiconductor substrate or a semiconductor substrate mounted on a further substrate such as a ceramic material. The modular processing units may each contain ribs, grooves, posts or other features to aid in handling and placement of the individual units.