Inventors:
Ondrej L. Krivanek - Sammamish WA
Niklas Dellby - Lake Forest Park WA
Andrew R. Lupini - Hemel Hempstead, GB
International Classification:
H01J 3721
US Classification:
250310, 250307, 250305, 356401, 356372, 356399
Abstract:
An autoadjusting charged-particle probe-forming apparatus improving the resolution of probe-forming charged-particle optical systems by minimizing optical aberrations. The apparatus comprises a source of charged particles, a probe-forming system of charged-particle lenses, a plurality of detectors optionally comprising a two-dimensional image detector, power supplies, a computer and appropriate software. Images are recorded by the two-dimensional detector and analyzed to determine the aberration characteristics of the apparatus. Alternately, multiple scanned images are recorded by a scanned image detector and also analyzed to determine the aberration characteristics of the apparatus. The aberration characteristics are used to automatically adjust the apparatus for improved optical performance.