NIELS GRONBECH JENSEN
Pilots at Waxwing Pl, Davis, CA
License number
California A4375079
Issued Date
Dec 2016
Expiration Date
Dec 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
707 Waxwing Pl, Davis, CA 95616
Professional information
Dopant Profile Modeling By Rare Event Enhanced Domain-Following Molecular Dynamics
US Patent:
6366873, Apr 2, 2002
Filed:
Oct 29, 1999
Appl. No.:
09/429266
Inventors:
Keith M. Beardmore - Santa Fe NM
Niels G. Jensen - Davis CA
Niels G. Jensen - Davis CA
Assignee:
The Regents of the University of California - Los Alamos NM
International Classification:
G06F 1750
US Classification:
703 13, 703 2, 703 3, 703 12, 700266, 700121
Abstract:
A computer-implemented molecular dynamics-based process simulates a distribution of ions implanted in a semiconductor substrate. The properties of the semiconductor substrate and ion dose to be simulated are first initialized, including an initial set of splitting depths that contain an equal number of virtual ions implanted in each substrate volume determined by the splitting depths. A first ion with selected velocity is input onto an impact position of the substrate that defines a first domain for the first ion during a first timestep, where the first domain includes only those atoms of the substrate that exert a force on the ion. A first position and velocity of the first ion is determined after the first timestep and a second domain of the first ion is formed at the first position. The first ion is split into first and second virtual ions if the first ion has passed through a splitting interval. The process then follows each virtual ion until all of the virtual ions have come to rest.