Inventors:
John J. Hautala - Beverly MA, US
Nathan E. Baxter - Arlington MA, US
Assignee:
TEL Epion Inc. - Billerica MA
International Classification:
H01J 37/317
Abstract:
A method of modifying a material layer on a substrate is described. The method comprises forming the material layer on the substrate. Thereafter, the method comprises establishing a gas cluster ion beam (GCIB) having an energy per atom ratio ranging from about 0. 25 eV per atom to about 100 eV per atom, and modifying the material layer by exposing the material layer to the GCIB.