Inventors:
Bok Hoen Kim - San Jose CA, US
Nam Le - San Jose CA, US
Martin Seamons - San Jose CA, US
Ameeta Madhava - San Francisco CA, US
Michael P. Nault - Woodland Park CO, US
Thomas Nowak - Cupertino CA, US
Tsutomu Tanaka - Santa Clara CA, US
Moshe Sarfaty - Cupertino CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01L 21306
US Classification:
15634525, 15634524, 15634529, 15634535, 15634551, 134 56 R
Abstract:
In a substrate processing apparatus, a substrate processing chamber has a substrate support to support a substrate, a gas delivery system to provide an energized cleaning gas to the chamber to clean process residues formed on surfaces in the chamber during processing of the substrate, and an exhaust to exhaust the cleaning gas. A detector monitors a chemiluminescent radiation emitted from about a surface during cleaning of the process residues by the energized cleaning gas and generates a signal in relation to the monitored chemiluminescent radiation. A controller receives the signal and evaluates the signal to determine an endpoint of the cleaning process.