MICHAEL WILLIAM BRUNER
Pilots at Okanogan Dr, Saratoga, CA

6660552, Dec 9, 2003

Mar 14, 2002

10/100627

Alexander Payne - Ben Lomond CA
Christopher Gudeman - Los Gatos CA
James Hunter - Santa Clara CA
Michael Bruner - Saratoga CA
Clinton Carroll - Fremont CA

Silicon Light Machines - Sunnyvale CA

H01L 2100

438 48, 438 57, 438 58, 438 64

A grating light valve with reduced surface charging is disclosed. Surface charging is measured by the propensity an insulating surface to accept and transport a charge. The grating light valve of the instant invention has a plurality of spaced and movable ribbons formed from Si N coupled to a substrate structure formed of SiO. A portion of the ribbons are moved to alternate between conditions for constructive and destructive interference with an incident light source having a wavelength by applying the appropriate switching voltages across the portion of ribbons and the substrate structure. When charging occurs on surfaces of the grating light valve, the switching voltages required to operate the grating light valve are shifted and diminishing the performance of the grating light valve. By drying silicon-based surfaces of the grating light valve and exposing the silicon-based surfaces of the grating light valve to a Nitrogen-rich pacify gas environment, the surfaces of the grating light valve exhibit reduced charging and consistent response to applied bias voltages. In the drying step, residual water or moisture is removed from the surfaces by elevating the temperature of the grating light valve structure in a vacuum environment.

6387723, May 14, 2002

Jan 19, 2001

09/765922

Alexander Payne - Ben Lomond CA
Christopher Gudeman - Los Gatos CA
James Hunter - Santa Clara CA
Michael Bruner - Saratoga CA
Clinton Carroll - Fremont CA

Silicon Light Machines - Sunnyvale CA

H01L 2100

438 48, 438 64, 438106

A method of treating silicon-based surfaces for reducing charge migration is disclosed. In accordance with the method, a silicon-based surface is treated with Nitrogen-rich pacifying gas environment, after the surface is actuated. The surface is actuated in a drying step, wherein residual water or moisture is removed from the surfaces at an elevated temperature and a reduced pressure. The method of the instant invention is particularly useful for the treatment of ribbon surfaces in grating light valve device, wherein after the ribbon surfaces are treated according to the current invention, surface charging remains low for several days, even in open air conditions.

7750420, Jul 6, 2010

Mar 24, 2005

11/089921

Dean L. Field - Graham WA, US
Charles N. Stone - Leander TX, US
Michael W. Bruner - Saratoga CA, US

Cypress Semiconductor Corporation - San Jose CA

H01L 29/78

257416, 257414, 310313 R, 310313 B

An integrated circuit is provided which includes one or more device elements formed above a base substrate, a structure forming a sealed cavity above at least a portion of the one or more device elements, and one or more conductive devices formed above the sealed cavity. A method for fabrication of such an integrated circuit is also provided. An exemplary embodiment of the integrated circuit includes a surface acoustic wave device having a plurality of tracks each with a first interdigitated transducer configured to convert a receiving electric field energy into mechanical wave energy and a second interdigitated transducer configured to convert the mechanical wave energy into an output electric field energy. The SAW device also includes a conductor arranged above and spanning across at least two tracks of the plurality of tracks and coupled to the first interdigitated transducers of at least the two tracks.