MICHAEL TANGUAY
Broker in Kennebunk, ME
License number
Massachusetts 9049586
Issued Date
Oct 19, 2002
Expiration Date
Jan 1, 2005
Type
Salesperson
Address
Address
Kennebunk, ME 04043
Personal information
See more information about MICHAEL TANGUAY at radaris.comName
Address
Phone
311C High St, Sanford, ME 04073
139 Fletcher St, Kennebunk, ME 04043
15 Brooks St, Brewer, ME 04412
15 Sandville Rd, Limington, ME 04049
27 Oak St, Brewer, ME 04412
Professional information
See more information about MICHAEL TANGUAY at trustoria.com
Apparatus For Tilting A Beam System
Apparatus For Tilting A Beam System
US Patent:
6661009, Dec 9, 2003
Filed:
May 31, 2002
Appl. No.:
10/159790
Inventors:
Alexander Groholski - Salem MA
Riccardo Drainoni - Woburn MA
Michael Tanguay - Kennebunk ME
Riccardo Drainoni - Woburn MA
Michael Tanguay - Kennebunk ME
Assignee:
FEI Company - Hillsboro OR
International Classification:
H01J 3700
US Classification:
250310, 250306, 250307, 250251, 25044211
Abstract:
The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.