Inventors:
Vladimir Schwartz - Lexington MA
Michael Schwartz - Lexington MA
Klaus Bierwagen - Waltham MA
International Classification:
B05C 1102
Abstract:
An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing the escape for fumes into the ambient atmosphere during the spin coating of a substrate carried by the substrate carrier. The lid is also designed for improving the air flow around the substrate carried by the substrate carrier during the spin coating of the substrate.