Inventors:
Michael A. Smith - Boise ID, US
Sukesh Sandhu - Boise ID, US
Xianfeng Zhou - Meridian ID, US
Graham Wolstenholme - Boise ID, US
International Classification:
H01L 29/06
Abstract:
The invention includes methods of forming oxide structures under corners of transistor gate stacks and adjacent trenched isolation regions. Such methods can include exposure of a semiconductor material to steam and H, with the Hbeing present to a concentration of from about 2% to about 40%, by volume. An oxide structure formed under the bottom corner of a transistor gate stack can have a bottom surface with a topography that includes a step of at least about Å, and an upper surface directly over the bottom surface and having a topography that is substantially planar. Methodology of the present invention can be utilized to form semiconductor constructions suitable for incorporation into highly integrated circuitry. The highly integrated circuitry can be incorporated into electronic systems, and can, for example, be utilized in processors and/or memory storage devices.