Inventors:
Ronald A. Rudder - Wake Forest NC
George C. Hudson - Clayton NC
Robert C. Hendry - Hillsborough NC
Robert J. Markunas - Chapel Hill NC
Michael J. Mantini - Raleigh NC
Assignee:
Research Triangle Institute - Research Triangle Park NC
International Classification:
B05D 306
Abstract:
A chemical vapor deposition (CVD) process and apparatus for the growth of diamond films using vapor mixtures of selected compounds having desired moieties, specifically precursors that provide carbon and etchant species that remove graphite. The process involves two steps. In the first step, feedstock gas enters a conversion zone. In the second step, by-products from the conversion zone proceed to an atomization zone where diamond is produced. In a preferred embodiment a feedstock gas phase mixture including at least 20% water which provides the etchant species is reacted with an alcohol which provides the requisite carbon precursor at low temperature (55. degree. -1100. degree. C. ) and low pressure (0. 1 to 100 Torr), preferably in the presence of an organic acid (acetic acid) which contributes etchant species reactant.