MICHAEL F CALLAHAN
Plumbers in Bedford, MA
License number
Massachusetts 7394
Expiration Date
May 1, 1998
Type
Master Plumber
Address
Address
Bedford, MA 01730
Professional information
Forming Metal Nitrides
US Patent:
6676752, Jan 13, 2004
Filed:
Feb 26, 2002
Appl. No.:
10/083614
Inventors:
Michael J. Suscavage - Shirley MA
David F. Bliss - Arlington MA
Michael J. Callahan - Bedford MA
Gerald W. Iseler - Chelmsford MA
John S. Bailey - Temple NH
David F. Bliss - Arlington MA
Michael J. Callahan - Bedford MA
Gerald W. Iseler - Chelmsford MA
John S. Bailey - Temple NH
Assignee:
The United States of America as represented by the Secretary of the Air Force - Washington DC
International Classification:
C30B 2306
US Classification:
117104, 117952, 20429812, 20429814, 42725536, 427255394
Abstract:
Method and apparatus are provided for forming metal nitrides (MN) wherein M is contacted with iodine vapor or hydrogen iodide (HI) vapor to form metal iodide (MI) and contacting MI with ammonia to form the MN in a process of reduced or no toxicity. MN is then deposited on a substrate, on one or more seeds or it can self nucleate on the walls of a growth chamber, to form high purity metal nitride material. The inventive MN material finds use in semiconductor materials and in making nitride electronic devices as well as other uses.