Inventors:
Rich Blank - San Jose CA, US
Jim Roberts - San Jose CA, US
Wayne Tang - Union City CA, US
Michael Bergeson - Fremont CA, US
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
H01L 21/68, B25J 18/00, F16D 71/00
Abstract:
Rotational hardstop assemblies that provide greater than 360 degrees of non-continuous rotation for rotating mechanisms are provided. In certain embodiments, an assembly is used to provide 630 or more degrees of rotation for the shoulder axis of a robot, such as a wafer transfer robot. The rotational hardstop assemblies include opposing magnets as springs. According to various embodiments, the opposing magnets provide non-contact engagement and produce no contact noise nor have any wear over time. The rotational hardstop assemblies provide the ability to location from either direction of rotation of a robot cylindrical coordinate system.