MICHAEL ALBERT RICHIE
Pilots at Franklin St, Santa Cruz, CA

5078922, Jan 7, 1992

Oct 22, 1990

7/601270

Craig C. Collins - Santa Cruz CA
Michael A. Richie - Santa Cruz CA
Fred F. Walker - Santa Cruz CA
Brian C. Goodrich - Los Gatos CA
Lowell B. Campbell - Santa Cruz CA

Watkins-Johnson Company - Palo Alto CA

B01F 304

261139

An improved bubbler has walls formed of thin stainless steel. A hollow cylindrical body member forms a cylindrical sidewall and has welded to it a top end cap and a bottom end cap. A horizontally disposed sparger tube is connected to the carrier-gas inlet tube and is positioned within the bubbler chamber adjacent to the bottom end cap. The sparger tube has a plurality of horizontally spaced-apart exit holes formed therein for providing a plurality of carrier-gas streams into the liquid chemical. The carrier gas bubbles up through the liquid chemical, causing the liquid chemical to vaporize and diffuse into the carrier gas. A substantially uniform temperature throughout the chemical liquid is provided with a heat-conductive enclosure formed of aluminum plates which are thicker than the walls of the bubbler chamber and which contact and entirely surround the exterior surface of the stainless steel bubbler chamber. Heating and cooling means are also provided for controlling the temperature of the liquid chemical in the bubbler chamber at a predetermined temperature. The bubbler chamber includes additional features such as a dimple formed in the bottom end cap to prevent reflection of light from a laser liquid-level sensor unit.

4834020, May 30, 1989

Dec 4, 1987

7/128806

Lawrence D. Bartholomew - Santa Cruz CA
Nicholas M. Gralenski - Aptos CA
Michael A. Richie - Santa Cruz CA
Michael L. Hersh - Boulder Creek CA

Watkins-Johnson Company - Palo Alto CA

C23C 1646, C23C 1654

118719

A conveyorized atmospheric pressure chemical vapor deposition apparatus having a heated muffle and a conveyor belt for conveying objects to be coated through said muffle. At least one chemical vapor deposition zone is provided in the muffle. An injector assembly is also provided for uniformly injecting first and second reactant gases in the deposition zone across the width of the conveyor belt and against the surfaces of the objects to be coated. The gases exit from slots connected to distribution plenums. Polished cooled surfaces are used on the injector assembly to minimize deposition of chemicals thereon.

4494316, Jan 22, 1985

Mar 14, 1983

6/475125

Erik Stephansen - San Jose CA
Rajeeva Sharma - San Jose CA
Michael Richie - Santa Cruz CA

Impact Systems, Inc. - San Jose CA

F26B 2304

34 68

A cross-direction web dryer includes a support structure arranged transversely across the web of moving paper. The drying apparatus has as its main structural support a large diameter structural member which is pivotally mounted on two end supports so that the associated cantilevered heating or drying modules can be rotated away from the moving web when desired. The structural member also provides an electrical wireway or conduit for the power cables to the individual dryer modules. Individual heater modules are arranged so that the cooling air enters a built-in plenum where air pressures are equalized for effective cooling of the quartz lamp heaters in the modules.