Inventors:
John Perkins - Boulder CO, US
Marinus Franciscus Antonius Maria Van Hest - Lakewood CO, US
David Ginley - Evergreen CO, US
Matthew Taylor - Golden CO, US
George A. Neuman - Holland MI, US
Henry A. Luten - Holland MI, US
Jeffrey A. Forgette - Hudsonville MI, US
John S. Anderson - Holland MI, US
Assignee:
Alliance for Sustainable Energy, LLC - Golden CO
International Classification:
B32B 15/00, C23C 16/00
US Classification:
428702, 428689, 428640, 427250
Abstract:
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.