Inventors:
Matthew B Linford - Salt Lake City UT
Christopher E. D. Chidsey - San Francisco CA
Assignee:
The Board of Trustees of the Leland Stanford Junior University - Stanford CA
International Classification:
H01L 21306, B44C 122, C03C 1500, C03C 2506
Abstract:
A method for producing a molecular layer of a selected molecular moiety (44) on a silicon surface (40) is provided in which a silicon surface (10) is etched to form a hydrogenated silicon surface and combined with a free radical-producing compound, where the free radical produced by the free radical-producing compound corresponds to the selected molecular moiety (44). The combined silicon surface and free radical-producing compound is then heated to sufficient temperature to initiate reaction between the free radical-producing compound and the hydrogenated silicon surface.