Inventors:
Steve Sheeran - Longmont CO, US
Mark A. Toffle - Saint Louis Park MN, US
Mark D. Anderson - Champlin MN, US
Rodney D. Dahlenburg - Prior Lake MN, US
Colin G. Presly - Shakopee MN, US
Paul J. Poisson - Boulder CO, US
Assignee:
Seagate Technology LLC - Cupertino CA
International Classification:
H05B 3/68
Abstract:
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.