Mark D Smith
Electrician at Setters Way, Colorado Springs, CO

6513654, Feb 4, 2003

Jul 10, 2001

09/902519

Mark V. Smith - Colorado Springs CO
Robert P. Wartenbergh - Woodside CA
William P. Pennybacker - Tracy CA

Asyst Technologies, Inc. - Fremont CA

B65D 8548

206454, 206710

The present invention is a support structure for supporting a reticle or silicon wafer. The support structure includes a support column and a retaining structure. In addition to retaining a wafer, the present invention also creates a discharge path to remove electrostatic charges from the wafer. The retaining structure mechanically engages each support column to create a discharge path from the wafer to a ground. Specifically, electrostatic charges that dissipate from the wafer travel along the support structure to the support column and exit the SMIF pod through the pod door.

2007017, Jul 26, 2007

Jan 25, 2006

11/339462

John Burns - Colorado Springs CO, US
Martin Forbes - Divide CO, US
Matthew Fuller - Colorado Springs CO, US
Jeffery King - Colorado Springs CO, US
Mark Smith - Colorado Springs CO, US

B65D 85/00

206711000

A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.

2011011, May 19, 2011

Mar 13, 2009

12/922408

James A. Watson - Eden Prairie MN, US
John Burns - Colorado Springs CO, US
Martin I. Forbes - Divide CO, US
Matthew A. Fuller - Colorado Springs CO, US
Mark V. Smith - Colorado Springs CO, US

ENTEGRIS, INC. - Billerica MA

B65D 85/86

206710

A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

D673853, Jan 8, 2013

Aug 6, 2012

29/429021

John Burns - Colorado Springs CO, US
Mark V. Smith - Colorado Springs CO, US
Eric S. Olson - Shorewood MN, US
Russ V. Raschke - Chanhassen MN, US
Michael S. Adams - New Prague MN, US

Entegris, Inc. - Billerica MA

0907

D 9456

7100772, Sep 5, 2006

Nov 15, 2004

10/989232

John Burns - Colorado Springs CO, US
Matthew A. Fuller - Colorado Springs CO, US
Jeffery J. King - Colorado Springs CO, US
Martin L. Forbes - Divide CO, US
Mark V. Smith - Colorado Springs CO, US

Entegris, Inc. - Chaska MN

B65D 85/90

206710, 206711

A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

7073667, Jul 11, 2006

Oct 22, 2004

10/971556

John Burns - Colorado Springs CO, US
Matthew A. Fuller - Colorado Springs CO, US
Jeffery J. King - Colorado Springs CO, US
Martin L. Forbes - Divide CO, US
Mark V. Smith - Colorado Springs CO, US

Entegris, Inc. - Chaska MN

B65D 85/30, B65D 85/48

206710, 206454, 2064591

A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.

7347329, Mar 25, 2008

Oct 22, 2004

10/971714

John Burns - Colorado Springs CO, US
Matthew A. Fuller - Colorado Springs CO, US
Jeffery J. King - Colorado Springs CO, US
Martin L. Forbes - Divide CO, US
Mark V. Smith - Colorado Springs CO, US
Michael Zabka - Eagan MN, US

Entegris, Inc. - Chaska MN

B65D 85/00

206711, 206710, 206832, 206722, 16422, 16425, 220756, 220759, 220768, 220772

A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.