Inventors:
Michael D. Gruenhagen - Salt Lake City UT, US
Suku Kim - South Jordan UT, US
James J. Murphy - South Jordan UT, US
Ihsiu Ho - Salt Lake City UT, US
Eddy Tjhia - Sunnyvale CA, US
Chung-Lin Wu - San Jose CA, US
Mark Larsen - Sandy UT, US
Rohit Dikshit - Herriman UT, US
Assignee:
Fairchild Semiconductor Corporation - South Portland ME
International Classification:
H01L 23/48
US Classification:
257774, 257773, 257698, 257E25017, 257E23145, 257E21549, 257E21577, 257E21585
Abstract:
Disclosed are semiconductor die structures that enable a die having a vertical power device to be packaged in a wafer-level chip scale package where the current-conducting terminals are present at one surface of the die, and where the device has very low on-state resistance. In an exemplary embodiment, a trench and an aperture are formed in a backside of a die, with the aperture contacting a conductive region at the top surface of the die. A conductive layer and/or a conductive body may be disposed on the trench and aperture to electrically couple the backside current-conducting electrode of the device to the conductive region. Also disclosed are packages and systems using a die with a die structure according to the invention, and methods of making dice with a die structure according to the invention.