MARK ALEXANDER LIN, MD
Anesthesiologist Assistant at Bascom Ave, San Jose, CA

7714287, May 11, 2010

Aug 19, 2008

12/194153

Edward M. James - San Francisco CA, US
Ye Yang - Fremont CA, US
Mark Lin - San Jose CA, US
Alexander J. Gubbens - Redwood City CA, US
Paul Petric - Pleasanton CA, US

KLA-Tencor Corporation - San Jose CA

H01J 49/08, G01N 21/00, G01N 23/00

250310, 250306, 250307, 250396 R, 250397, 2504922

An electron beam apparatus is configured for dark field imaging of a substrate surface. Dark field is defined as an operational mode where the image contrast is sensitive to topographical features on the surface. A source generates a primary electron beam, and scan deflectors are configured to deflect the primary electron beam so as to scan the primary electron beam over the substrate surface whereby secondary and/or backscattered electrons are emitted from the substrate surface, said emitted electrons forming a scattered electron beam. A beam separator is configured to separate the scattered electron beam from the primary electron beam. The apparatus includes a cooperative arrangement which includes at least a ring-like element, a first grid, and a second grid. The ring-like element and the first and second grids each comprises conductive material. A segmented detector assembly is positioned to receive the scattered electron beam after the scattered electron beam passes through the cooperative arrangement.

7560703, Jul 14, 2009

Jul 2, 2007

11/772301

David A. Soltz - San Jose CA, US
Ye Yang - Fremont CA, US
Mark C. Lin - San Jose CA, US
Laurence S. Horndon - Santa Clara CA, US
Edward G. Solomon - Menlo Park CA, US
Joseph A. Heanue - Palo Alto CA, US
John F. Heanue - Manchester MA, US
M. Nasser Ghodsi - Hamilton MA, US

KLA-Tencor Corporation - Milpitas CA

H01J 37/244

250397, 250310

A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons along a length of the first element to a distal second end, and a second element that receives the photons from the second end of the first element, converts the photons to electrons, and multiplies the electrons, where no additional element is disposed between the second end of the first element and the second element, except optionally at least one of a photon-conductive epoxy, a lens, and an optical coupling plate that touches both the second end of the first element and the second element.