Luke A. Hohreiter
Engineers at Fairfax Rd, West Palm Beach, FL
License number
Colorado 55575
Issued Date
Jun 20, 2002
Renew Date
Jun 20, 2002
Type
Engineer Intern
Address
Address
617 Fairfax Rd, West Palm Beach, FL 33405
Professional information
Resonator System With A Plurality Of Individual Mechanically Coupled Resonators And Method Of Making Same
US Patent:
2009030, Dec 17, 2009
Filed:
Nov 7, 2007
Appl. No.:
11/983195
Inventors:
Amy Duwel - Cambridge MA, US
Luke Hohreiter - West Palm Beach FL, US
Douglas W. White - Lexington MA, US
David J. Carter - Maynard MA, US
Mathew Varghese - Arlington MA, US
Luke Hohreiter - West Palm Beach FL, US
Douglas W. White - Lexington MA, US
David J. Carter - Maynard MA, US
Mathew Varghese - Arlington MA, US
International Classification:
H01L 41/22
US Classification:
29 2535
Abstract:
A method of fabricating a MEMS piezoelectric resonator system includes forming a stack of layers on a substrate, the stack comprising at least one piezoelectric material layer spaced from the substrate by a sacrificial layer, patterning the stack to form a plurality of edge coupled resonators, and removing at least a portion of the sacrificial layer to suspend the resonators relative to the substrate.
Resonator System With A Plurality Of Individual Mechanically Coupled Resonators And Method Of Making Same
US Patent:
2005014, Jun 30, 2005
Filed:
Sep 21, 2004
Appl. No.:
10/946541
Inventors:
Amy Duwel - Cambridge MA, US
Luke Hohreiter - West Palm Beach FL, US
Douglas White - Lexington MA, US
David Carter - Maynard MA, US
Mathew Varghese - Arlington MA, US
Luke Hohreiter - West Palm Beach FL, US
Douglas White - Lexington MA, US
David Carter - Maynard MA, US
Mathew Varghese - Arlington MA, US
International Classification:
H03H009/58
US Classification:
333189000, 333197000
Abstract:
A resonator system wherein a plurality of resonators each including piezoelectric material are suspended relative to a substrate. An edge of each resonator is mechanically coupled to an edge of another resonator and the plurality of resonators expand and contract reaching resonance in response to an applied electric field.