Inventors:
Loren T. Lancaster - Colorado Springs CO
Ryan T. Hirose - Colorado Springs CO
Assignee:
NVX Corporation - Colorado Springs CO
International Classification:
H01L 27115
Abstract:
A transistor structure (10), memory array (150) using the transistor structure, and method for making it are presented. The memory array (150), on a semiconductor substrate (152), contains a plurality of substantially parallel bit lines (154,155). A plurality of channel regions in the substrate (152) are bounded in one direction by a sets of bit line pairs (154,155). A conductive field shield layer (160), over a first insulation layer (156), is patterned to provide electrical regions over the channel regions between the first alternate sets of the bit lines (154,155) to form isolation transistor structures when biased with respect to the substrate (152). The field shield layer (160) is patterned to expose the channel regions of the memory transistors (151,. . . , 151'") between second alternate sets of the bit lines (155,154). A second insulating layer (163) is formed over the field shield layer (160).