Inventors:
Laurie Peterson - Phoenix AZ, US
Richard Hopla - Cranston RI, US
Ahmad Naiini - East Greenwich RI, US
William Weber - Rumford RI, US
Pamela Waterson - Northbridge MA, US
Assignee:
ARCH SPECIALTY CHEMICALS, INC.
International Classification:
H01L021/31
Abstract:
An edge bead remover composition that includes at least one ketone selected from the group consisting of:
wherein Rand Rare independently selected from the group consisting of: methyl, ethyl, n-propyl, n-butyl, sec-butyl, and isobutyl, and wherein n equals 1 or 2; at least one ester other than lactones; and at least one lactone.