LAURA POPE HALE, MD PHD
Medical Practice in Durham, NC
License number
North Carolina 9500088
Category
Medical Practice
Type
Anatomic Pathology & Clinical Pathology
Address
Address
40 Dumc), Durham, NC 27710
Phone
(919) 684-4771
Professional information
Dr. Laura P Hale, Durham NC - MD (Doctor of Medicine)
Specialties:
Anatomic & Clinical Pathology
Address:
Dumc STE 3712, Durham 27710
Certifications:
Anatomic & Clinical Pathology, 1995
Awards:
Healthgrades Honor Roll
Languages:
English
Education:
Medical School
Duke University
Graduated: 1991
Duke U Med Ctr
Duke University
Graduated: 1991
Duke U Med Ctr
Device Lithography Using Multi-Level Resist Systems
US Patent:
4532005, Jul 30, 1985
Filed:
May 21, 1984
Appl. No.:
6/612338
Inventors:
Michael J. Grieco - Gillette NJ
Laura P. Hale - Durham NC
Laura P. Hale - Durham NC
Assignee:
AT&T Bell Laboratories - Murray Hill NJ
International Classification:
G03C 500, B44C 122, C03C 1500, B05D 306
US Classification:
1566611
Abstract:
In order to hard-bake the bottom resist layer of a tri-level resist system for patterning a device wafer, the resist is subjected to a positive ramp heating step (of increasing ambient temperatures).