LAURA POPE HALE, MD PHD
Medical Practice in Durham, NC
License number
North Carolina 9500088
Category
Medical Practice
Type
Anatomic Pathology & Clinical Pathology
Address
Address
40 Dumc), Durham, NC 27710
Phone
(919) 684-4771
Personal information
See more information about LAURA POPE HALE at radaris.comName
Address
Phone
408 Billingham Dr, Burlington, NC 27215
4088 Rollingwood Dr, Trinity, NC 27370
36 Clement Dr, Asheville, NC 28805
4021 Carver St, Durham, NC 27705
5507 Harvey Rd TRLR 9, Jamestown, NC 27282
Professional information
See more information about LAURA POPE HALE at trustoria.com
Dr. Laura P Hale, Durham NC - MD (Doctor of Medicine)
Dr. Laura P Hale, Durham NC - MD (Doctor of Medicine)
Specialties:
Anatomic & Clinical Pathology
Address:
Dumc SUITE 3712, Durham 27710
Certifications:
Anatomic & Clinical Pathology, 1995
Awards:
Healthgrades Honor Roll
Languages:
English
Education:
Medical School
Duke University
Graduated: 1991
Duke U Med Ctr
Duke University
Graduated: 1991
Duke U Med Ctr
Device Lithography Using Multi-Level Resist Systems
Device Lithography Using Multi-Level Resist Systems
US Patent:
4532005, Jul 30, 1985
Filed:
May 21, 1984
Appl. No.:
6/612338
Inventors:
Michael J. Grieco - Gillette NJ
Laura P. Hale - Durham NC
Laura P. Hale - Durham NC
Assignee:
AT&T Bell Laboratories - Murray Hill NJ
International Classification:
G03C 500, B44C 122, C03C 1500, B05D 306
US Classification:
1566611
Abstract:
In order to hard-bake the bottom resist layer of a tri-level resist system for patterning a device wafer, the resist is subjected to a positive ramp heating step (of increasing ambient temperatures).