KEVIN P. O'BRIEN, MD
Urology at Zion Ave, San Diego, CA

8411720, Apr 2, 2013

Jun 30, 2011

13/174640

Kevin Michael O'Brien - San Diego CA, US
Joshua Jon Thornes - San Diego CA, US
Daniel Jason Riggs - San Diego CA, US
Rui Jiang - San Diego CA, US

Cymer, Inc. - San Diego CA

H01S 3/22

372 55, 372 56, 372 57, 372 58, 372 60

A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser such as an excimer laser is disclosed. The laser is continuously fired at a low power output, and the gas in the amplifier laser chamber bled if necessary until the discharge voltage meets or exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased, and the gas bled again if necessary until the voltage and pressure meet or exceed the minimum values. The laser is then fired in a burst pattern that approximates the expected firing of the laser in operation, and the gas bled if necessary until the discharge voltage meets or exceeds the minimum value and the output energy meets or exceeds a minimum value, again without dropping the pressure in the chamber below the minimum value. Once the minimum values are provided, the process runs quickly without manual interaction.

2011024, Oct 13, 2011

Apr 7, 2010

12/755772

Kevin M. O'Brien - San Diego CA, US
Fedor B. Trintchouk - San Diego CA, US

Cymer Inc. - San Diego CA

H01S 3/10

372 25

An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.

7822084, Oct 26, 2010

Apr 9, 2008

12/082253

Kevin M. O'Brien - San Diego CA, US
Robert N. Jacques - San Diego CA, US

Cymer, Inc. - San Diego CA

H01S 3/137, H01S 3/082, H01S 3/097, H01S 3/131

372 32, 372 19, 372 29011, 372 2902, 372 55, 372100, 372102

According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that may comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.